Mixed-metal-oxide planar optical waveguides
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
Thin films of ZrO/sub 2/--SiO/sub 2/ were deposited by reactive magnetron sputtering and reactive ion beam sputter deposition. The films were fabricated into planar optical waveguides by either ion beam milling or using liftoff lithography. The indices of refraction of the mixed-oxide films were found to be approximately a linear function of composition and were varied from 2.15 to 1.67. The films with >12% SiO/sub 2/ were amorphous and thermally stable to at least 500 /sup 0/C. Optical loss measurements on films with high ZrO/sub 2/ content indicated losses of 3 to 4 dB/cm.
- Research Organization:
- IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
- OSTI ID:
- 6115190
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 7:3; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fabrication of optical waveguides by ion-beam sputtering
Sulphide Ga{sub x}Ge{sub 25-x}Sb{sub 10}S{sub 65(x=0,5)} sputtered films: Fabrication and optical characterizations of planar and rib optical waveguides
Reactive magnetron sputtered zirconium oxide and zirconium silicon oxide thin films
Journal Article
·
Wed Dec 31 23:00:00 EST 1975
· J. Vac. Sci. Technol., v. 13, no. 1, pp. 104-106
·
OSTI ID:4041474
Sulphide Ga{sub x}Ge{sub 25-x}Sb{sub 10}S{sub 65(x=0,5)} sputtered films: Fabrication and optical characterizations of planar and rib optical waveguides
Journal Article
·
Wed Oct 01 00:00:00 EDT 2008
· Journal of Applied Physics
·
OSTI ID:21182654
Reactive magnetron sputtered zirconium oxide and zirconium silicon oxide thin films
Journal Article
·
Mon May 01 00:00:00 EDT 1989
· J. Vac. Sci. Technol., A; (United States)
·
OSTI ID:6183131
Related Subjects
36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
AMORPHOUS STATE
BEAMS
CHALCOGENIDES
DEPOSITION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
ION BEAMS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTIVITY
SILICATES
SILICON COMPOUNDS
SPUTTERING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
WAVEGUIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
AMORPHOUS STATE
BEAMS
CHALCOGENIDES
DEPOSITION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
ION BEAMS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
REFRACTIVITY
SILICATES
SILICON COMPOUNDS
SPUTTERING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
WAVEGUIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES