Reactive magnetron sputtered zirconium oxide and zirconium silicon oxide thin films

Journal Article · Mon May 01 04:00:00 EDT 1989 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.576263· OSTI ID:6183131

Russak, M A; Jahnes, C V; Katz, E P

Thin films of ZrO/sub 2/ and ZrO/sub 2/--SiO/sub 2/ were deposited by reactive dc magnetron sputtering. The optical properties, density, microstructure, and crystalline phase of pure ZrO/sub 2/ films were found to be a function of deposition rate. In particular, the index of refraction could be varied from 1.77 to 2.13 by increasing the deposition rate from 11 to 720 A/min. The density of the films increased from 3.9 to 5.8 g/cm/sup 3/ over the same deposition rate range. Small amounts of SiO/sub 2/ (10 at. %) stabilized the mixed films in an amorphous phase. A linear relationship between index of refraction and SiO/sub 2/ content was observed and, as in the case of pure ZrO/sub 2/, increasing deposition rate resulted in mixed films with higher densities and indices for a fixed SiO/sub 2/ content. The structure and optical properties of the mixed films remained unchanged with thermal cycling up to 500 /sup 0/C.

• Research Organization: IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598
• OSTI ID: 6183131
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 7:3; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALI METAL COMPOUNDS
CHALCOGENIDES
CHARGED PARTICLES
CHLORIDES
CHLORINE COMPOUNDS
COATINGS
COHERENT SCATTERING
CRYSTAL STRUCTURE
DATA
DEPOSITION
DIFFRACTION
ELASTIC SCATTERING
ELECTRON MICROSCOPY
EXPERIMENTAL DATA
FILMS
HALIDES
HALOGEN COMPOUNDS
HELIUM IONS
INFORMATION
IONS
MICROSCOPY
MICROSTRUCTURE
NUMERICAL DATA
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHASE STUDIES
PHYSICAL PROPERTIES
REFRACTIVITY
RUTHERFORD SCATTERING
SCANNING ELECTRON MICROSCOPY
SCATTERING
SILICATES
SILICON COMPOUNDS
SODIUM CHLORIDES
SODIUM COMPOUNDS
SPUTTERING
SUBSTRATES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES