NbN/MgO/NbN edge-geometry tunnel junctions

Journal Article · Mon Jul 03 04:00:00 EDT 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.101760· OSTI ID:6091973

Hunt, B D; LeDuc, H G; Cypher, S R; Stern, J A; Judas, A

We report the fabrication and low-frequency testing of the first edge-geometry NbN/MgO/NbN superconducting tunnel junctions. The use of an edge geometry allows very small junction areas to be obtained, while the all-NbN electrodes permit operation at 8--10 K with a potential maximum operating frequency above 1 THz. Edge definition in the base NbN film was accomplished utilizing Ar ion milling with an Al/sub 2/O/sub 3/ milling mask, followed by a lower energy ion cleaning step. This process has produced all-refractory-material tunnel junctions with areas as small as 0.1 ..mu..m/sup 2/, resistance-area products less than 21 ..cap omega.. ..mu..m/sup 2/, and subgap to normal state resistance ratios larger than 18.

• Research Organization: Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109(US); Massachusetts Institute of Technology, Boston, Massachusetts 02139
• OSTI ID: 6091973
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 55:1; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALKALINE EARTH METAL COMPOUNDS
ARGON
CHALCOGENIDES
DATA
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUIDS
GASES
INFORMATION
JUNCTIONS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
NONMETALS
NUMERICAL DATA
OPERATION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
RARE GASES
REFRACTORY METAL COMPOUNDS
SUPERCONDUCTING FILMS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
TESTING
TRANSITION ELEMENT COMPOUNDS
TUNNEL EFFECT