Submicron area NbN/MgO/NbN tunnel junctions for SIS mixer applications

Conference · Fri Mar 01 04:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:6093130

LeDuc, H G; Judas, A; Cypher, S R; Bunble, B; Hunt, B D; Stern, J A ^[1]

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1. Center for Space Microelectronics Technology, Jet Propulsion Lab., California Inst. of Technology, Pasadena, CA (US)

This paper reports on progress in the development of submicron area mixer elements for operation in the submillimeter wave range. High current density NbN/MgO/NbN tunnel junctions with areas down to 0.1 {mu}m{sup 2} have been fabricated in both planar and edge geometries. The planar junctions were fabricated from in situ deposited trilayers using electron-beam lithography to pattern submicron area mesas. Modifications of fabrication techniques used in larger area NbN tunnel junctions are required and is discussed.

• OSTI ID: 6093130
• Report Number(s): CONF-900944--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
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Cermets
& Refractories-- Structure & Phase Studies
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665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BEAMS
CHALCOGENIDES
CORUNDUM
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CURRENT DENSITY
DESIGN
DIFFUSION BARRIERS
DISLOCATIONS
EDGE DISLOCATIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON BEAMS
ETCHING
FABRICATION
JUNCTIONS
LEPTON BEAMS
LINE DEFECTS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MINERALS
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHYSICAL PROPERTIES
PNICTIDES
QUARTZ
REFRACTORY METAL COMPOUNDS
SAPPHIRE
SUBSTRATES
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
SURFACE FINISHING
TRANSITION ELEMENT COMPOUNDS
TUNNEL EFFECT