Submicron NbN Josephson tunnel junctions for digital applications
Conference
·
· IEEE Trans. Magn.; (United States)
OSTI ID:6087804
Submicron NbN/MgO/NbN Josephson tunnel junctions have been investigated to make Josephson integrated circuits. The junctions have been fabricated successfully by the cross-line-patterning (CLIP) method with an electron-beam (EB) direct-writing technique. All refractory fabrication process for logic circuits using the CLIP method is presented. This process is applied to fabrication of a logic gate of 4JL containing 0.8 ..mu..m-square junctions as an example of digital applications. The logic gate has been fabricated by this process. The authors also discuss the characteristics of the gate.
- Research Organization:
- Electrotechnical Lab., 1-1-4 Umezono, Tsukuba-shi, Ibaraki (JP)
- OSTI ID:
- 6087804
- Report Number(s):
- CONF-880812-
- Conference Information:
- Journal Name: IEEE Trans. Magn.; (United States) Journal Volume: 25:2
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
656100 -- Condensed Matter Physics-- Superconductivity
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BEAM INJECTION
CHALCOGENIDES
DESIGN
DIGITAL SYSTEMS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON BEAM INJECTION
ELECTRONIC CIRCUITS
FABRICATION
GATING CIRCUITS
INTEGRATED CIRCUITS
JOSEPHSON JUNCTIONS
JUNCTIONS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MATERIALS TESTING
MICROELECTRONIC CIRCUITS
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
TESTING
TRANSITION ELEMENT COMPOUNDS
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
420201* -- Engineering-- Cryogenic Equipment & Devices
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
656100 -- Condensed Matter Physics-- Superconductivity
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BEAM INJECTION
CHALCOGENIDES
DESIGN
DIGITAL SYSTEMS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON BEAM INJECTION
ELECTRONIC CIRCUITS
FABRICATION
GATING CIRCUITS
INTEGRATED CIRCUITS
JOSEPHSON JUNCTIONS
JUNCTIONS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MATERIALS TESTING
MICROELECTRONIC CIRCUITS
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTIVITY
TESTING
TRANSITION ELEMENT COMPOUNDS