Gas-phase free radical reactions in the glow-discharge deposition of hydrogenated amorphous silicon from silane and disilane
Journal Article
·
· J. Appl. Phys.; (United States)
An analysis of a measurement by Matsuda and co-workers of the lifetimes of the free radicals involved in the glow-discharge deposition of amorphous hydrogenated silicon from silane and disilane at 20-mTorr pressure is consistent with the hypothesis that SiH or SiH/sub 2/, but not SiH/sub 3/, is the dominant radical in the deposition from silane at that pressure.
- Research Organization:
- Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York 11973
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 6067537
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 57:6; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400301 -- Organic Chemistry-- Chemical & Physicochemical Properties-- (-1987)
AMORPHOUS STATE
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
DECOMPOSITION
DEPOSITION
ELECTRIC DISCHARGES
ELEMENTS
GLOW DISCHARGES
HYDRIDES
HYDROGEN COMPOUNDS
HYDROGENATION
IONS
LIFETIME
MEDIUM VACUUM
MOLECULAR IONS
NITRIC OXIDE
NITROGEN COMPOUNDS
NITROGEN OXIDES
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
RADICALS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SURFACE COATING
VACUUM COATING
360601* -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400301 -- Organic Chemistry-- Chemical & Physicochemical Properties-- (-1987)
AMORPHOUS STATE
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
DECOMPOSITION
DEPOSITION
ELECTRIC DISCHARGES
ELEMENTS
GLOW DISCHARGES
HYDRIDES
HYDROGEN COMPOUNDS
HYDROGENATION
IONS
LIFETIME
MEDIUM VACUUM
MOLECULAR IONS
NITRIC OXIDE
NITROGEN COMPOUNDS
NITROGEN OXIDES
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
RADICALS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SURFACE COATING
VACUUM COATING