Dose and energy dependence of interface trap formation in cobalt-60 and x-ray environments
The radiation induced buildup of interface traps is examined on radiation hardened 20-nm gate oxide n-channel transistors irradiated with /sup 60/Co and 10 keV x-rays. A variation in the functional dependence of ..delta..D/sub it/ growth on dose from linear with dose to a square root dependence was observed. The samples with the largest low dose interface trap buildup showed the slowest rate of growth (D/sup 1/2/) while the samples with the smallest low dose ..delta..D/sub it/ show the fastest buildup (linear with dose). The authors offer a possible qualitative explanation of this behavior based on cluster centers. The interface trap density growth was also observed to tend toward saturation at doses above 3 Mrad(SiO/sub 2/). A photon energy dependence of D/sub it/ formation between /sup 60/Co and x-ray irradiation was not observed.
- Research Organization:
- Harry Diamond Labs., Adelphi, MD (US)
- OSTI ID:
- 6065330
- Report Number(s):
- CONF-880730-
- Journal Information:
- IEEE Trans. Nucl. Sci.; (United States), Journal Name: IEEE Trans. Nucl. Sci.; (United States) Vol. 35:6; ISSN IETNA
- Country of Publication:
- United States
- Language:
- English
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46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
654001* -- Radiation & Shielding Physics-- Radiation Physics
Shielding Calculations & Experiments
73 NUCLEAR PHYSICS AND RADIATION PHYSICS
BETA DECAY RADIOISOTOPES
BETA-MINUS DECAY RADIOISOTOPES
CHALCOGENIDES
COBALT 60
COBALT ISOTOPES
DOSE-RESPONSE RELATIONSHIPS
ELECTROMAGNETIC RADIATION
ELECTRONIC CIRCUITS
ELEMENTARY PARTICLES
ENERGY DEPENDENCE
ENVIRONMENTAL EFFECTS
GATING CIRCUITS
HARDENING
INTERFACES
INTERMEDIATE MASS NUCLEI
INTERNAL CONVERSION RADIOISOTOPES
IONIZING RADIATIONS
IRRADIATION
ISOMERIC TRANSITION ISOTOPES
ISOTOPES
JUNCTION TRANSISTORS
MASSLESS PARTICLES
MINUTES LIVING RADIOISOTOPES
NUCLEI
ODD-ODD NUCLEI
OXIDES
OXYGEN COMPOUNDS
PHOTONS
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
RADIATION HARDENING
RADIATION TRANSPORT
RADIATIONS
RADIOINDUCTION
RADIOISOTOPES
SEMICONDUCTOR DEVICES
TRANSISTORS
TRAPPING
TRAPS
X RADIATION
YEARS LIVING RADIOISOTOPES