Develop techniques for ion implantation of PLZT (lead-lanthanum-zirconate-titanate) for adaptive optics
Research was conducted at Pacific Northwest Laboratory to develop high photosensitivity adaptive optical elements utilizing ion implanted lanthanum-doped lead-zirconate-titanate (PLZT). One centimeter square samples were prepared by implanting ferroelectric and anti-ferroelectric PLZT with a variety of species or combinations of species. These included Ne, O, Ni, Ne/Cr, Ne/Al, Ne/Ni, Ne/O, and Ni/O, at a variety of energies and fluences. An indium-tin oxide (ITO) electrode coating was designed to give a balance of high conductivity and optical transmission at near uv to near ir wavelengths. Samples were characterized for photosensitivity; implanted layer thickness, index of refraction, and density; electrode (ITO) conductivity; and in some cases, residual stress curvature. Thin film anti-ferroelectric PLZT was deposited in a preliminary experiment. The structure was amorphous with x-ray diffraction showing the beginnings of a structure at substrate temperatures of approximately 550/sup 0/C. This report summarizes the research and provides a sampling of the data taken during the report period.
- Research Organization:
- Pacific Northwest Lab., Richland, WA (USA)
- DOE Contract Number:
- AC06-76RL01830
- OSTI ID:
- 6046600
- Report Number(s):
- PNL-6264; ON: DE88000642
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360601* -- Other Materials-- Preparation & Manufacture
360603 -- Materials-- Properties
640301 -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
COHERENT SCATTERING
COST ESTIMATION
DENSITY
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
FABRICATION
FILMS
INFRARED RADIATION
ION IMPLANTATION
LANTHANUM COMPOUNDS
LEAD COMPOUNDS
LIGHT TRANSMISSION
NEAR INFRARED RADIATION
NEAR ULTRAVIOLET RADIATION
OPTICAL PROPERTIES
OXYGEN COMPOUNDS
PHOTOSENSITIVITY
PHYSICAL PROPERTIES
PLZT
RADIATIONS
RARE EARTH COMPOUNDS
REFRACTIVITY
SCATTERING
SENSITIVITY
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
ULTRAVIOLET RADIATION
X-RAY DIFFRACTION
ZIRCONATES
ZIRCONIUM COMPOUNDS