Reactive magnetron sputtering of thin-film superconductor YBa/sub 2/Cu/sub 3/O/sub 7//sub -//sub x/

Journal Article · Sun Oct 25 23:00:00 EST 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98682· OSTI ID:6041081

Char, K; Kent, A D; Kapitulnik, A; Beasley, M R; Geballe, T H

Superconducting thin films of YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ have been successfully made by co-sputtering from the three targets in an Ar and O/sub 2/ mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1 x 10/sup 5/ A/cm/sup 2/ at 78 K and 2 x 10/sup 6/ A/cm/sup 2/ at 4.2 K. Highly oriented thin films have been obtained on SrTiO/sub 3/ /100/ substrates.

• Research Organization: Department of Applied Physics, Stanford University, Stanford, California 94305
• OSTI ID: 6041081
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:17; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
ARGON
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENT DENSITY
CURRENTS
DATA
ELECTRIC CURRENTS
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUIDS
GASES
HEAT TREATMENTS
INFORMATION
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE GASES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES