Superconductivity and resputtering effects in rf sputtered YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ thin films

Journal Article · Sun Dec 20 23:00:00 EST 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98975· OSTI ID:5574044

Shah, S I; Carcia, P F

Superconducting stoichiometric YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ films have been grown by rf sputtering of a single bulk material target in an Ar+10% O/sub 2/ sputtering atmosphere on a variety of substrates. Films on SrTiO/sub 3/ substrates exhibited the best post-annealing superconducting properties with the critical onset temperature of 90 K and zero resistance at 67 K. The maximum current density for these samples was 1 x 10/sup 5/ A/cm/sup 2/ at 4.2 K. An extensive loss of film underneath the target was observed during the growth of these films which can be attributed to resputtering due to oxygen anion or energetic neutral particle bombardment of the substrate.

• Research Organization: Central Research and Development Department, Experimental Station, E. I. du Pont de Nemours and Company, Wilmington, Delaware 19898
• OSTI ID: 5574044
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:25; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
ARGON
ARGON IONS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CURRENT DENSITY
DATA
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUIDS
GASES
GLOW DISCHARGES
HEAT TREATMENTS
INFORMATION
IONS
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE GASES
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE COATING
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES