Growth of YBa/sub 2/Cu/sub 3/O/sub 70//sub x/ thin films by sputtering
Thin YBa/sub 2/Cu/sub 3/O/sub 7-//sub x/ superconducting films have been grown by several sputtering techniques including single target rf glow discharge sputtering, multi-target rf sputtering, ion beam sputtering, and rf magnetron sputtering. A variety of substrates were used for the deposition and the best superconducting properties were obtained on single crystal (100) MgO and (100) SrTiO/sub 3/ substrates. RF sputtering was studied in detail because some very unique effects were observed during the sputtering. These effects, i.e., substrate heating, resputtering and stoichiometric deposition, were investigated. Substrate heating was found to be mainly due to secondary electron impingement. Resputtering may be mostly due to energetic neutral particle bombardment; however, negative ion bombardment cannot be ruled out. Ba deficiency in substoichiometric films may be due to the formation of Ba/sup +/ ion formation and recapture by the cathode and due to intense substrate heating. Films grown by rf diode sputtering had to be compensated with excess Ba to maintain stoichiometry.
- Research Organization:
- Central Research and Development Department, Experimental Station, E.I. du Pont de Nemours and Co., Wilmington, DE 19898
- OSTI ID:
- 7127801
- Report Number(s):
- CONF-871178-
- Journal Information:
- AIP Conf. Proc.; (United States), Journal Name: AIP Conf. Proc.; (United States) Vol. 165:1; ISSN APCPC
- Country of Publication:
- United States
- Language:
- English
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360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
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ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BEAMS
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
CRYSTALS
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
GLOW DISCHARGES
HEAT TREATMENTS
ION BEAMS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MONOCRYSTALS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RF SYSTEMS
SCATTERING
SORPTIVE PROPERTIES
SPUTTERING
STOICHIOMETRY
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
SURFACE PROPERTIES
TEMPERATURE DEPENDENCE
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS