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Atomic geometry at the CoSi/sub 2//Si (111) interface

Journal Article · · J. Vac. Sci. Technol., B; (United States)
DOI:https://doi.org/10.1116/1.584793· OSTI ID:6010504
We present a polarization-dependent Co /ital K/-edge SEXAFS investigation on the local atomic geometry around Co atoms at the interface between epitaxial CoSi/sub 2/ and Si(111). The Co interface atoms are found to be coordinated with eight Si atoms at CoSi/sub 2/-like bond lengths.
Research Organization:
Laboratoire pour l'Utilisation du Rayonnement Electromagnetique CNRS, CEA, MEN, Univ. Paris-Sud, F-91405 Orsay, France(FR)
OSTI ID:
6010504
Journal Information:
J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 7:4; ISSN JVTBD
Country of Publication:
United States
Language:
English

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