Determination of the atomic structure of the epitaxial CoSi/sub 2/:Si(111) interface using high-resolution Rutherford backscattering
Journal Article
·
· Phys. Rev. B: Condens. Matter; (United States)
High-resolution Rutherford backscattering is employed to study the atomic structure at the epitaxial CoSi/sub 2/:Si(111) interface. The Si atoms of the substrate are found to bond to Co atoms in the silicide. In this bonding arrangement the interface Co atoms are fivefold, or possibly eightfold, coordinated. Bond-angle distortions are essentially absent
- Research Organization:
- FOM Institute for Atomic and Molecular Physics, Foundation for Fundamental Research on Matter, Kruislaan 407, NL-1098 SJ Amsterdam, The Netherlands
- OSTI ID:
- 5184898
- Journal Information:
- Phys. Rev. B: Condens. Matter; (United States), Journal Name: Phys. Rev. B: Condens. Matter; (United States) Vol. 37:11; ISSN PRBMD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
BACKSCATTERING
COBALT COMPOUNDS
COBALT SILICIDES
CRYSTAL FACES
ELASTIC SCATTERING
ELEMENTS
FILMS
INTERFACES
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SILICIDES
SILICON
SILICON COMPOUNDS
SUBSTRATES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
360602* -- Other Materials-- Structure & Phase Studies
BACKSCATTERING
COBALT COMPOUNDS
COBALT SILICIDES
CRYSTAL FACES
ELASTIC SCATTERING
ELEMENTS
FILMS
INTERFACES
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SILICIDES
SILICON
SILICON COMPOUNDS
SUBSTRATES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS