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Atomic arrangement at Cr/GaAs(110) interfaces

Journal Article · · J. Vac. Sci. Technol., B; (United States)
DOI:https://doi.org/10.1116/1.584794· OSTI ID:5951980
To further explore the mechanism of Schottky barrier formation at a metal--semiconductor interface, high-resolution electron micrographs were simulated in order to interpret the contrast observed experimentally at Cr/GaAs(110) interfaces. Calculations for a wide range of defocus and sample thickness values, based on an assumed ideal arrangement of atoms at the interface, do not explain the observed contrast. Analytical data suggest that the interface is As rich. In this paper, therefore, only those point defects that lead to As-rich interfaces were considered. Among such point defects, Ga vacancies seem likely to contribute to such experimentally observed contrast.
Research Organization:
Center for Advanced Materials, Lawrence Berkeley Laboratory, Berkeley, California 94720(US); National Center for Electron Microscopy, Lawrence Berkeley Laboratory, Berkeley, California 94720
DOE Contract Number:
AC03-76SF00098
OSTI ID:
5951980
Journal Information:
J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 7:4; ISSN JVTBD
Country of Publication:
United States
Language:
English