Fabrication of an all-refractory circuit using lift-off with image-reversal photoresist

Conference · Fri Mar 01 04:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:5922113

Meier, D L; Przybysz, J X; Kang, J ^[1]

---

1. Westinghouse Science and Technology Center, Pittsburgh, PA (US)

This paper reports on a four-stage shift register fabricated using Nb/Al-Al{sub 2}O{sub 3}/Nb Josephson junctions, Mo resistors, Nb transmission lines, and SiO{sub 2} insulating layers. The circuit had 36 junctions (5 {mu}m, 1000 A/cm{sup 3}) and 61 resistors (1.2 ohms/square), with a minimum feature size of 2 {mu}m. An eight-mask process was used in the fabrication. All material layers were deposited by sputtering. Patterning for all but one of the masking levels was done by lift-off using image reversal lithography in most cases. Lift-off avoided many of the problems common to reactive ion etching (RIE), including the need for etch stops, non-uniformity in etching, and the formation of organic residue (polymer) on the wafer.

• OSTI ID: 5922113
• Report Number(s): CONF-900944--
• Conference Information: Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 27:2
• Country of Publication: United States
• Language: English

Related Subjects

665300 -- Interactions Between Beams & Condensed Matter-- (1992-)
665411 -- Basic Superconductivity Studies-- (1992-)
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BEAMS
CABLES
CHALCOGENIDES
CONDUCTOR DEVICES
ELECTRIC CABLES
ELECTRICAL EQUIPMENT
ELECTRICAL INSULATION
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
ETCHING
FABRICATION
INTEGRATED CIRCUITS
ION BEAMS
JOSEPHSON JUNCTIONS
JUNCTIONS
METALS
MICROELECTRONIC CIRCUITS
NIOBIUM
OXIDES
OXYGEN COMPOUNDS
PHOTORESISTORS
RESISTORS
SILICON COMPOUNDS
SILICON OXIDES
SPUTTERING
SUPERCONDUCTING CABLES
SUPERCONDUCTING JUNCTIONS
SURFACE FINISHING
TRANSITION ELEMENTS