Production of thin film networks which utilize chrome-gold conductors
Conference
·
OSTI ID:5914936
Thin film networks (TFNs), designed by Sandia Laboratories, Albuquerque, are manufactured by the Bendix Corporation, Kansas City Division, for DOE programs. The majority of the TFNs fabricated at this division utilize gold films 3 to 9 ..mu..m thick evaporated over a chromium film. The chromium film is evaporated over sputtered tantalum nitride film, and the substrate material is 0.027 in. (0.686 mm) thick alumina. The TFNs must have high film adhesion characteristics, meet high bondability requirements, and allow stable electrical parameters. Various production techniques ensure these high reliability TFNs.
- Research Organization:
- Bendix Corp., Kansas City, MO (USA)
- DOE Contract Number:
- EY-76-C-04-0613
- OSTI ID:
- 5914936
- Report Number(s):
- BDX-613-2257; CONF-791113-3
- Country of Publication:
- United States
- Language:
- English
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