Effects of humidity during photoprocessing on thin film metallization adhesion
Humidity effects during photoprocessing on tantalum/chromium/gold thin film networks (TFNs) were investigated. Humidity conditions at various process steps were controlled by placing either desiccant or water in handling containers for the TFNs. The TFNs photoprocessed in humid conditions had a much higher occurrence of metallization failures compared to TFNs processed in dry conditions. Ceramic surface defects were shown to cause pores in the thin films, and these pores enhanced corrosion susceptibility for the films. This study resulted in a desiccated storage process for production of TFNs.
- Research Organization:
- Bendix Corp., Kansas City, MO (USA)
- DOE Contract Number:
- EY-76-C-04-0613
- OSTI ID:
- 5491753
- Report Number(s):
- BDX-613-2312
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360105* -- Metals & Alloys-- Corrosion & Erosion
ALKALI METAL COMPOUNDS
ALLOYS
AMMONIUM COMPOUNDS
AMMONIUM NITRATES
CERAMICS
CERIUM COMPOUNDS
CERIUM NITRATES
CHEMICAL REACTIONS
CHROMIUM ALLOYS
CONTROL
CORROSION
CORROSIVE EFFECTS
DEFECTS
DIMENSIONS
FILMS
GOLD ALLOYS
HALIDES
HALOGEN COMPOUNDS
HUMIDITY
INORGANIC PHOSPHORS
IODIDES
IODINE COMPOUNDS
NITRATES
NITROGEN COMPOUNDS
OXYGEN COMPOUNDS
PHOSPHORS
POROSITY
POTASSIUM COMPOUNDS
POTASSIUM IODIDES
RARE EARTH COMPOUNDS
SURFACES
TANTALUM ALLOYS
THICKNESS
360105* -- Metals & Alloys-- Corrosion & Erosion
ALKALI METAL COMPOUNDS
ALLOYS
AMMONIUM COMPOUNDS
AMMONIUM NITRATES
CERAMICS
CERIUM COMPOUNDS
CERIUM NITRATES
CHEMICAL REACTIONS
CHROMIUM ALLOYS
CONTROL
CORROSION
CORROSIVE EFFECTS
DEFECTS
DIMENSIONS
FILMS
GOLD ALLOYS
HALIDES
HALOGEN COMPOUNDS
HUMIDITY
INORGANIC PHOSPHORS
IODIDES
IODINE COMPOUNDS
NITRATES
NITROGEN COMPOUNDS
OXYGEN COMPOUNDS
PHOSPHORS
POROSITY
POTASSIUM COMPOUNDS
POTASSIUM IODIDES
RARE EARTH COMPOUNDS
SURFACES
TANTALUM ALLOYS
THICKNESS