YBa/sub 2/Cu/sub 3/O/sub 7/minus///sub /delta// films deposited by a novel ion beam sputtering technique

Journal Article · Mon Jul 17 04:00:00 EDT 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.101568· OSTI ID:5889894

Kingon, A I; Auciello, O; Ameen, M S; Rou, S H; Krauss, A R

Superconducting films of YBa/sub 2/Cu/sub 3/O/sub 7/minus///sub /delta// have been synthesized in a novel ion beam sputter deposition system which features a rotating target holder with BaO/sub 2/, CuO, and Y/sub 2/O/sub 3/ as the sputtering targets. The dwell time of the ion beam on each oxide target is determined by a computer-controlled feedback loop using the signal from a programmable quartz crystal resonator. The sputtered fluxes of all film components originate from the same spatial location, ensuring homogeneous film composition. The results presented demonstrate for the first time an automated ion beam sputter deposition system with the capability of producing high /ital T//sub /ital c// superconducting films by controlled sputtering of either elemental metallic components or oxide precursors. The concept may be extended to include processes such as patterning, production of layered structures (junctions), and film encapsulation necessary for microcircuit manufacturing based on high /ital T//sub /ital c// superconducting films.

• Research Organization: Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7907 (US); Argonne National Laboratories, Materials Science, and Chemistry Divisions, Argonne, Illinois 60439
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 5889894
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 55:3; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
AUTOMATION
BARIUM COMPOUNDS
BARIUM OXIDES
BEAMS
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FABRICATION
FILMS
ION BEAMS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SURFACE COATING
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES