/ital In/ /ital situ/ grown YBa/sub 2/Cu/sub 3/O/sub 7/minus//ital d// thin films from single-target magnetron sputtering

Journal Article · Mon Aug 07 04:00:00 EDT 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.102436· OSTI ID:6011840

Eom, C B; Sun, J Z; Yamamoto, K; Marshall, A F; Luther, K E; Geballe, T H; Laderman, S S

Using single-target off-axis sputter deposition, high quality superconducting films of YBa/sub 2/Cu/sub 3/O/sub 7/minus//delta// were made /ital in/. These films have properties which are distinctly different from those of bulk ceramics and of post-deposition annealed films. Their superconducting resistive transitions remain sharp regardless of the value of /ital T//sub /ital c// between 75 and 86 K. Normal-state conductivities are as high or higher than the best single crystals. Critical current densities as high as 6/times/10/sup 7/ A/cm/sup 2/ at 4.2 K. /ital T//sub /ital c// (/ital R/=0) falls off with film thickness down to 10 K for 35--40 A films. All of the above properties are relatively insensitive to compositional variation. The results can be explained if the /ital in/ /ital situ/ growth results in well-formed CuO/sub 2/ planes with defects occurring elsewhere.

• Research Organization: Stanford University, Stanford, California 94305(US); Circuit Technology R D, Hewlett Packard Co., Palo Alto, California 94304
• OSTI ID: 6011840
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 55:6; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CERAMICS
CHALCOGENIDES
CHEMICAL COMPOSITION
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CRYSTAL DEFECTS
CRYSTAL GROWTH
CRYSTAL STRUCTURE
CURRENT DENSITY
CURRENTS
DATA
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
LOW TEMPERATURE
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
PHYSICAL PROPERTIES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THICKNESS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
ULTRALOW TEMPERATURE
VERY LOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES