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Freeze-out characterization of radiation hardened N + polysilicon gate CMOS transistors

Conference · · IEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (United States)
OSTI ID:5825970
; ;  [1];  [2]
  1. Harris Corp., Melbourne, FL (United States). Semiconductor Sector
  2. Florida Inst. of Tech., Melbourne, FL (United States)
In this paper freeze-out behavior of radiation hardened N + polysilicon gate CMOS devices is studied at liquid-nitrogen temperature before and after irradiation at different dose levels. Explanations are given for the threshold voltage variations and freeze-out effects before and after irradiation. The degree of freeze-out of the counterdope implant is controlled by temperature, applied gate potential and applied body-to-source potential. Based on experimental results of this work, freeze-out is not significantly affected by irradiation dose, or the magnitude of the gate bias during radiation.
OSTI ID:
5825970
Report Number(s):
CONF-910751--
Conference Information:
Journal Name: IEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (United States) Journal Volume: 38:6
Country of Publication:
United States
Language:
English