Characterization of SnO₂ GIAR films

Conference · Wed Jan 01 04:00:00 EST 1992 · Proceedings of SPIE - The International Society for Optical Engineering

DOI:https://doi.org/10.1117/12.51257· OSTI ID:5691660

Kentjana, Meiman ^[1]; Homma, Hitoshi ^[1]; Alp, Ercan E. ^[2]; Mooney, Timothy M. ^[2]

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1. City Univ. of New York (CUNY), NY (United States)
2. Argonne National Laboratory (ANL), Argonne, IL (United States)

In an attempt to develop a monochromator of synchrotron radiation ((Delta) E approximately 10-6 eV) using grazing incidence antireflection (GIAR) principle, we made SnO₂ GIAR films on Pd (buffer layer) / (alpha) -Al₂O₃ (substrate). Films are fabricated by magnetron sputtering technique and characterized film thickness and interface roughness by x-ray diffraction technique using the conventional and synchrotron radiation sources. We demonstrated the electronic scattering suppression of approximately 10-2 and that the present system is feasible to achieve the required goals for monochromatization of synchrotron radiation source for the energy range of 23.87 keV.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division (MSE)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 5691660
• Report Number(s): ANL/CP--73464; CONF-9107115--12; ON: DE91015539
• Conference Information: Journal Name: Proceedings of SPIE - The International Society for Optical Engineering Journal Volume: 1546
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BREMSSTRAHLUNG
CHALCOGENIDES
COHERENT SCATTERING
DIAGNOSTIC TECHNIQUES
DIFFRACTION
DIMENSIONS
ELECTROMAGNETIC RADIATION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
GRAZING INCIDENCE TOMOGRAPHY
INTERFACES
MAGNETRONS
MEETINGS
METALS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MONOCHROMATORS
OXIDES
OXYGEN COMPOUNDS
PALLADIUM
PLATINUM METALS
RADIATIONS
ROUGHNESS
SCATTERING
SPUTTERING
SURFACE PROPERTIES
SYNCHROTRON RADIATION
THICKNESS
TIN COMPOUNDS
TIN OXIDES
TOMOGRAPHY
TRANSITION ELEMENTS
X-RAY DIFFRACTION