Tunable, ultrahigh spectral brightness KrF* excimer laser source

Journal Article · Fri Mar 14 23:00:00 EST 1980 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.91528· OSTI ID:5688973

Hawkins, R T; Egger, H; Bokor, J; Rhodes, C K

An extremely high spectral brightness KrF* (248 nm) excimer source is described. This instrument combines the property of continuous tunability over the full gain profile with the following output pulse characteristics: pulse energy approx.60 mJ, pulse duration approx.10 nsec, spectral width 15030 MHz, absolute frequency control to within 300 MHz, and beam divergence approx.50 ..mu..rad. Within the uncertainty of measurement, the spectral width of the output radiation is Fourier transform limited, and the beam divergence corresponds to the diffraction of the radiating aperture.

• Research Organization: Department of Phsyics, University of Illinois at Chicago Circle P. O. Box 4348, Chicago, Illinois 60680
• OSTI ID: 5688973
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 36:6; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
APERTURES
COHERENT SCATTERING
CONTROL
DATA
DIFFRACTION
ENERGY RANGE
FLUORIDES
FLUORINE COMPOUNDS
FOURIER TRANSFORMATION
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
INFORMATION
INTEGRAL TRANSFORMATIONS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
LINE WIDTHS
OPENINGS
PULSES
RADIATION SOURCES
RARE GAS COMPOUNDS
SCATTERING
SPECTRA
TRANSFORMATIONS
TUNING
WAVELENGTHS