Tunable, ultrahigh-spectral-brightness ArF* excimer laser source

Journal Article · Wed Jul 01 04:00:00 EDT 1981 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.92555· OSTI ID:6426943

Egger, H; Srinivasan, T; Hohla, K; Scheingraber, H; Vidal, C R; Pummer, H; Rhodes, C K

An extremely high spectral-brightness ArF* 193-nm excimer source with the following output pulse characteristics is described: approx.30-mJ pulse energy, approx.5-nsec pulse duration, spectral width less than 260 MHz, absolute frequency control to within 1.8 GHz, approx.5 x 15-..mu..rad beam divergence, and repetition rate up to 10 Hz. Within the uncertainty of measurement, the spectral width of the output radiation is Fourier transform limited and the beam divergence corresponds to the diffraction limit of the radiating aperture.

• Research Organization: Department of Physics, University of Illinois at Chicago Circle, Box 4348 Chicago, Illinois 60680
• DOE Contract Number: AC02-79ER10350
• OSTI ID: 6426943
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 39:1; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
APERTURES
ARGON COMPOUNDS
ARGON FLUORIDES
BEAM OPTICS
BRIGHTNESS
COHERENT SCATTERING
CONTROL
DATA
DIFFRACTION
EXPERIMENTAL DATA
FLUORIDES
FLUORINE COMPOUNDS
FOURIER TRANSFORMATION
FREQUENCY CONTROL
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
INFORMATION
INTEGRAL TRANSFORMATIONS
LASERS
LIGHT SOURCES
LINE WIDTHS
NUMERICAL DATA
OPENINGS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
PULSES
RADIATION SOURCES
RARE GAS COMPOUNDS
SCATTERING
SPECTRA
TRANSFORMATIONS
TUNING