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Third-harmonic generation using an ultrahigh-spectral-brightness ArF* source

Journal Article · · Opt. Lett.; (United States)
DOI:https://doi.org/10.1364/OL.7.000093· OSTI ID:5582317

Tunable coherent radiation in the vicinity of 64 nm has been produced by third-harmonic generation of the output of an ultrahigh-spectral-brightness ArF* source in various imple gaseous media. The following performance parameters of the ArF* system are used: pulse energy, approx.300 mJ; pulse duration, approx.7 nsec; spectral width, <260 MHz; beam divergence, approx.5 ..mu..rad x 15 ..mu..rad; and repetition rate up to 10 Hz. Third-harmonic generation with peak powers up to 30 W has been observed in an apparatus that eliminates photoabsorption of the third harmonic in the differential pumping range.

Research Organization:
Department of Physics, University of Illinois at Chicago Circle, P.O. Box 4348, Chicago, Illinois 60680
OSTI ID:
5582317
Journal Information:
Opt. Lett.; (United States), Journal Name: Opt. Lett.; (United States) Vol. 7:3; ISSN OPLED
Country of Publication:
United States
Language:
English

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