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U.S. Department of Energy
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Amorphous silicon solar cells by hydrogen implantation. Quarterly report No. 1, 1 January-31 March 1979

Technical Report ·
DOI:https://doi.org/10.2172/5649165· OSTI ID:5649165

The purpose of this program, Amorphous Silicon Solar Cells by Hydrogen Ion Implantation, is to investigate applications of ion implantation to preparation of amorphous silicon material and devices. Implantation can be considered for one or more of several purposes including doping, hydrogenation, amorphization, and material character adjustment. This program is to be based around examination of the effects of various implantation conditions upon performance of thin film silicon cell devices. Operational devices were fabricated from CVD polysilicon. The device material will be altered to become amorphous and hydrogenated by means of subsequent implantation. Special implantation facilities and procedures and an adequate device structure are required to conduct this study. Progress is reported.

Research Organization:
Spire Corp., Bedford, MA (USA)
DOE Contract Number:
AC03-79ET23042
OSTI ID:
5649165
Report Number(s):
SAN-3042-1
Country of Publication:
United States
Language:
English