Amorphous silicon solar cells by hydrogen implantation. Final report, 1 January 1979-31 August 1980

Technical Report · Fri Aug 01 04:00:00 EDT 1980

DOI:https://doi.org/10.2172/5037059· OSTI ID:5037059

Kirkpatrick, A. R.; Melas, A. A.

Several prospective applications of ion implantation to preparation of amorphous materials and to formation of device component elements for amorphous silicon solar cells are studied. In principle ion implantation, in conjunction with adequate annealing techniques when required, can allow very broad adjustments to be made to composition and microphysical structure of a silicon film adequately thick to meet requirements of an amorphous cell. If implantation can be fully exploited by such an approach, starting material for an amorphous cell could be a silicon film which would not necessarily be initially amorphous or include required dopants and compositional constituents such as hydrogen. A series of selected implantation procedures could be used to accomplish the following: doping, hydrogenation, amorphization, and special impurity incorporation. In order to evaluate the validity and merit of the candidate applications of implantation, the program performed included the following: (1) examination of implantation limits and requirements, (2) development of adequate experimental implantation capabilities and procedures, (3) development of a material test structure and of an amorphous solar cell test structure, (4) preliminary survey of implantation effect upon silicon film material and device structures, and (5) preparation of an amorphous silicon cell. Results are presented and discussed. (WHK)

• Research Organization: Spire Corp., Bedford, MA (USA)
• DOE Contract Number: AC03-79ET23042
• OSTI ID: 5037059
• Report Number(s): SAN-3042-4; FR-10064
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
AMORPHOUS STATE
BORON IONS
CHARGED PARTICLES
CHEMICAL REACTIONS
CRYSTAL DOPING
CURRENT DENSITY
DIRECT ENERGY CONVERTERS
DISTRIBUTION
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY RANGE
EQUIPMENT
FABRICATION
FLUORINE IONS
HYDROGEN IONS
HYDROGENATION
INFRARED RADIATION
ION IMPLANTATION
IONS
KEV RANGE
KEV RANGE 100-1000
LIGHT TRANSMISSION
OPTICAL PROPERTIES
PERFORMANCE TESTING
PHOSPHORUS IONS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
RADIATIONS
SEMIMETALS
SILICON
SILICON IONS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPATIAL DISTRIBUTION
STOPPING POWER
TESTING