Soft X-ray optics using multilayer mirrors

Journal Article · Sun Jan 01 04:00:00 EST 1984 · Opt. Eng.; (United States)

OSTI ID:5643445

Lee, P; Bartlett, R J

Recent advances in thin film fabrication techniques have made multilayer mirrors an important new addition in the field of soft X-ray diffraction optics. A multilayer is a one-dimensional periodic structure that consists of an alternating sequence of high and low atomic number elements evaporated or sputtered onto a substrate. Characterization of these devices has been carried out on a variety of X-ray sources, including synchrotron radiation, over a large range of parameters. Extensive modeling of the diffraction characteristics of multilayers has shown that the theory of optics of thin films gives good agreement between measured and calculated diffraction profiles. Application of multilayer mirrors as normal incidence X-ray collectors, monochromators, and beam splitters is being explored. 25 references.

• Research Organization: GA Technologies, Inc., San Diego, CA
• OSTI ID: 5643445
• Journal Information: Opt. Eng.; (United States), Journal Name: Opt. Eng.; (United States) Vol. 24; ISSN OPEGA
• Country of Publication: United States
• Language: English

Related Subjects

657005* -- Theoretical Physics-- Optics
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BREMSSTRAHLUNG
COHERENT SCATTERING
DIFFRACTION
ELECTROMAGNETIC RADIATION
FILMS
IONIZING RADIATIONS
MIRRORS
OPTICAL PROPERTIES
OPTICS
PHYSICAL PROPERTIES
RADIATIONS
REFRACTIVITY
SCATTERING
SOFT X RADIATION
SYNCHROTRON RADIATION
THIN FILMS
X RADIATION
X-RAY DIFFRACTION