Study of multilayer structures as soft x-ray mirrors
Journal Article
·
· AIP Conference Proceedings
- Department of Physics, Pohang University of Science and Technology, Pohang, Kyungbuk 790-784 (Korea, Republic of)
Molybdenum-silicon multilayer as soft x-ray mirrors have been fabricated using a magnetron sputtering system. Their structures have been characterized by x-ray diffraction (XRD) and computer simulation. Reflectivities at normal incidence have been measured by using monochromatized synchrotron radiation in the 18-24 nm region. A normal incidence reflectivity as high as 40% at 20.8 nm was achieved. Multilayer structural parameters optimized for various soft x-ray laser wavelengths are also given.
- OSTI ID:
- 21153891
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 332; ISSN APCPCS; ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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