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U.S. Department of Energy
Office of Scientific and Technical Information

X-ray multilayers for diffractometers, monochromators, and spectrometers; Proceedings of the Meeting, San Diego, CA, Aug. 17-19, 1988

Conference ·
OSTI ID:5138326
Various papers on X-ray multilayers for diffractometers, monochromators, and spectrometers are presented. The general topics addressed include: multilayer monochromators for X-rays and neutrons; multilayer fabrication and characterization; modeling; multilayer substrates and characterization; design and applications of multilayer spectrometers; and specialized multilayer devices. Individual subjects considered include: monochromator based on W/C multilayers of 40 A layer spacing; comparison among multilayer soft X-ray mirrors fabricated by electron, beam, dc, RF-magnetron sputtering, and ion beam sputtering deposition; soft X-ray multilayers produced by sputtering and molecular beam epitaxy: substrate and interfacial roughness; effects of surface quality upon the performance of normal incidence X-ray/XUV imaging systems; recent results in multilayer research; design of an imaging microscope for soft-X-ray applications; and assessment of multilayer mirror for XUV laser use.
OSTI ID:
5138326
Report Number(s):
CONF-8808285--
Country of Publication:
United States
Language:
English