Estimation of sputtering rate by bombardment with argon gas ions

Journal Article · Tue Jan 01 04:00:00 EST 1980 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.327331· OSTI ID:5635973

Okajima, Y

The sputtering rates of single-crystal Si and polycrystalline Ag, Cu, Ni, Ti, and Al were measured. These target materials were bombarded with argon ions accelerated at 10 kV. The sputtered depth after a given interval of bombardment was greatest for Ag, and decreased for the other materials in the following order: Cu, Ni, Ti, Si, and Al. The difference in the sputtering rates of these target materials was investigated on the basis of their binding energies, and the following expression for sputtering rate was obtained experimentally, S/sub r/=K (I/D)(M/E/sub c/)/sup k/, where S/sub r/ is the sputtering rate, I is the current density of incident argon ions, and D, M, and E/sub c/ are the atomic concentration, mass number, and cohesive energy of a target material, respectively. K and k are constants. Sputtering yield (S/sub y/) can be written S/sub y/=K' (M/E/sub c/)/sup k/. The result was compared with experimental data of many target materials already reported. These results were used to estimate the sputtered depth after a given interval in the practical analyses using ion bombardment.

• Research Organization: Hitachi Research Lab., Kuji-machi, Hitachi-shi, Ibaraki 319-12, Japan
• OSTI ID: 5635973
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 51:1; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM
ARGON IONS
CHARGED PARTICLES
COLLISIONS
COPPER
CRYSTALS
CURRENT DENSITY
DATA
ELEMENTS
EQUATIONS
FLUIDS
GASES
INFORMATION
IONS
IRRADIATION
MATHEMATICAL MODELS
METALS
MONOCRYSTALS
NICKEL
POLYCRYSTALS
QUANTITY RATIO
SEMIMETALS
SILICON
SILVER
SPUTTERING
TARGETS
TITANIUM
TRANSITION ELEMENTS