Development and fabrication of a solar cell junction processing system. Quarterly progress report No. 7, October 1981
Progress is reported on work to develop automated junction formation equipment involving a design incorporating an ion implanter with a pulsed electron beam annealer and wafer transport system. Assembly and system testing was continued on the development of a pulsed electron beam for 4-inch wafers. Wafers are reported successfully pulsed and solar cells fabricated. Assembly of the transport locks is reported completed. The successful operation of the transport is reported, but reproducibility is not sufficient. An experimental facility to examine potential scaleup problems associated with the proposed ion implanter design has been constructed and tested. Cells have been implanted and found to have efficiency identical to the normal implant process. (LEW)
- Research Organization:
- Spire Corp., Bedford, MA (USA)
- DOE Contract Number:
- NAS-7-100-955640
- OSTI ID:
- 5627336
- Report Number(s):
- DOE/JPL/955640-81/7; ON: DE82005937
- Country of Publication:
- United States
- Language:
- English
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