Development and fabrication of a solar cell junction processing system. Quarterly progress report No. 4

Technical Report · Thu Jan 01 04:00:00 EST 1981

DOI:https://doi.org/10.2172/6660879· OSTI ID:6660879

The basic objectives of the program are the following: (1) to design, develop, construct and deliver a junction processing system which will be capable of producing solar cell junctions by means of ion implantation followed by pulsed electron beam annealing; (2) to include in the system a wafer transport mechanism capable of transferring 4-inch-diameter wafers into and out of the vacuum chamber where the ion implantation and pulsed electron beam annealing processes take place; (3) to integrate, test and demonstrate the system prior to its delivery to JPL along with detailed operating and maintenance manuals; and (4) to estimate component lifetimes and costs, as necessary for the contract, for the performance of comprehensive analyses in accordance with the Solar Array Manufacturing Industry Costing Standards (SAMICS). Progress is reported. (WHK)

• Research Organization: Spire Corp., Bedford, MA (USA)
• DOE Contract Number: NAS-7-100-955640
• OSTI ID: 6660879
• Report Number(s): DOE/JPL/955640-81/1
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
BEAM PULSERS
BEAMS
DIRECT ENERGY CONVERTERS
ELECTRON BEAMS
ELECTRON SOURCES
EQUIPMENT
FABRICATION
HEAT TREATMENTS
ION IMPLANTATION
JUNCTIONS
LEPTON BEAMS
PARTICLE BEAMS
PARTICLE SOURCES
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PROCESSING
RADIATION SOURCES
SEMICONDUCTOR JUNCTIONS
SOLAR CELLS
SOLAR EQUIPMENT