Development and fabrication of a solar cell junction processing system. Quarterly report No. 2, July 1980

Technical Report · Tue Jul 01 04:00:00 EDT 1980

DOI:https://doi.org/10.2172/5356699· OSTI ID:5356699

Siesling, R.

The basic objectives of the program are the following: (1) to design, develop, construct and deliver a junction processing system which will be capable of producing solar cell junctions by means of ion implantation followed by pulsed electron beam annealing; (2) to include in the system a wafer transport mechanism capable of transferring 4-inch-diameter wafers into and out of the vacuum chamber where the ion implantation and pulsed electron beam annealing processes take place; (3) to integrate, test and demonstrate the system prior to its delivery to JPL along with detailed operating and maintenance manuals; and (4) to estimate component lifetimes and costs, as necessary for the contract, for the performance of comprehensive analyses in accordance with the Solar Array Manufacturing Industry Costing Standards (SAMICS). Under this contract the automated junction formation equipment to be developed involves a new system design incorporating a modified, government-owned, JPL-controlled ion implanter into a Spire-developed pulsed electron beam annealer and wafer transport system. When modified, the ion implanter will deliver a 16 mA beam of /sup 31/P/sup +/ ions with a fluence of 2.5 x 10/sup 15/ ions per square centimeter at an energy of 10 keV. The throughput design goal rate for the junction processor is 10/sup 7/ four-inch-diameter wafers per year.

• Research Organization: Jet Propulsion Lab., Pasadena, CA (USA)
• DOE Contract Number: NAS-7-100-955640
• OSTI ID: 5356699
• Report Number(s): DOE/JPL/955640-80/2
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
640301 -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ANNEALING
ATOMIC IONS
BEAMS
CAPACITORS
CHARGED PARTICLES
COLLIMATORS
COST
DESIGN
DIRECT ENERGY CONVERTERS
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC LENSES
ELECTRON BEAMS
ELECTRONIC CIRCUITS
ELECTRONIC EQUIPMENT
EQUIPMENT
HEAT TREATMENTS
ION IMPLANTATION
ION SOURCES
IONS
LENSES
LEPTON BEAMS
PARTICLE BEAMS
PHOSPHORUS IONS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
POWER SUPPLIES
RESEARCH PROGRAMS
SERVICE LIFE
SOLAR CELLS
SOLAR EQUIPMENT
SPECIFICATIONS
VACUUM SYSTEMS