Reduced thermal budget processing of Y--Ba--Cu--O high temperature superconducting thin films by metalorganic chemical vapor deposition

Journal Article · Wed May 01 00:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577421· OSTI ID:5623048

Singh, R; Sinha, S; Hsu, N J; Ng, J T.C.; Chou, P; Thakur, R P.S. ^[1]; Narayan, J ^[2]

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1. School of Electrical Engineering and Computer Science, University of Oklahoma, Norman, Oklahoma 73019 (USA)
2. Materials Science and Engineering Department, North Carolina State University, Raleigh, North Carolina 27695-7916 (USA)

Metalorganic chemical vapor deposition (MOCVD) has the potential of emerging as a viable technique to fabricate ribbons, tapes, coated wires, and the deposition of films of high temperature superconductors, and related materials. As a reduced thermal budget processing technique, rapid isothermal processing (RIP) based on incoherent radiation as the source of energy can be usefully coupled to conventional MOCVD. In this paper we report on the deposition and characterization of high quality superconducting thin films of Y--Ba--Cu--O (YBCO) on MgO and SrTiO{sub 3} substrates by RIP assisted MOCVD. By using a mixture of N{sub 2}O and O{sub 2} as the oxygen source films deposited initially at 600 {degree}C for 1 min and then at 740 {degree}C for 30 min are primarily {ital c}-axis oriented and with zero resistance being observed at 84 and 89 K for MgO and SrTiO{sub 3} substrates, respectively. The zero magnetic field current densities at 77 K for MgO and SrTiO{sub 3} substrates are 1.2{times}10{sup 6} and 1.5{times}10{sup 6} A/cm{sup 2}, respectively. It is envisaged that high energy photons from the incoherent light source and the use of a mixture of N{sub 2}O and O{sub 2} as the oxygen source, assist chemical reactions and lower overall thermal budget for processing of these films.

• OSTI ID: 5623048
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN 0734-2101; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
DEPOSITION
ELECTRIC CURRENTS
FILMS
HIGH TEMPERATURE
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VERY HIGH TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES