Metalorganic chemical vapor deposition of superconducting YBa sub 2 Cu sub 3 O sub 7 minus x in a high-speed rotating disk reactor

Journal Article · Tue Nov 14 23:00:00 EST 1989 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.343739· OSTI ID:5212581

Noh, D W; Gallois, B ^[1]; Chern, C S; Caracciolo, R; Kear, B H ^[2]; Zawadzki, P A; Tompa, G S; Norris, P E ^[3]

---

1. Department of Materials Science and Engineering, Stevens Institute of Technology, Hoboken, New Jersey 07030 (US)
2. Department of Mechanics and Materials Science, Rutgers the State University of New Jersey, Piscataway, New Jersey (USA) 08854
3. EMCORE Corporation, 35 Elizabeth Avenue, Somerset, New Jersey (USA) 08873

Metalorganic chemical vapor deposition (MOCVD) of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} films on (100) SrTiO{sub 3} was performed in a high-speed rotating disk reactor. Metal {beta}-diketonates were used as source materials. Energy dispersive spectroscopy analysis showed as-grown and post-annealed samples to have a composition matching that of superconducting thin-film standards. X-ray data showed the annealed films to be highly oriented with the {ital c} axis perpendicular to the substrate. The best films exhibited an onset temperature of 90 K and zero resistance at 88 K. The width of the superconductive transition ({lt}2 K) is the best value thus far reported for 123 films grown in a commercially available MOCVD system.

• OSTI ID: 5212581
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 66:10; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
FILMS
HEAT TREATMENTS
MOTION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
ROTATION
SCATTERING
STRONTIUM COMPOUNDS
SUBSTRATES
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES