Chemical vapor deposition of YBa/sub 2/Cu/sub 3/O/sub 7/ using metalorganic chelate precursors

Journal Article · Mon Oct 31 04:00:00 EST 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.100475· OSTI ID:6872426

Panson, A J; Charles, R G; Schmidt, D N; Szedon, J R; Machiko, G J; Braginski, A I

Superconducting films of YBa/sub 2/ Cu/sub 3/ O/sub 7/ were prepared using metalorganic chelate precursors at ambient pressure. Ba and Y were transported using fluoride-substituted ..beta..-diketonates, while a ..beta..-keto-imide chelate was used for Cu. Deposition at 500 /sup 0/C on Al/sub 2/ O/sub 3/ and SrTiO/sub 3/ substrates by reaction with O/sub 2/ saturated with room temperature water vapor formed crystalline mixtures of BaF/sub 2/ , YF/sub 3/ , and CuO. Superconducting YBa/sub 2/ Cu/sub 3/ O/sub 7/ formed after annealing in Ar/H/sub 2/O at 835 /sup 0/C followed by O/sub 2/ at 900 and 400 /sup 0/C with a slow cooling in O/sub 2/ to below 200 /sup 0/C. A 2.3 ..mu..m film on a (100) SrTiO/sub 3/ substrate had an onset T/sub c/ of 90 K with zero resistance at 70 K. The film showed a mixture of c- and a-axis orientation. A similar film on (11-bar02) Al/sub 2/O/sub 3/ showed zero resistance at 65 K.

• Research Organization: Westinghouse Research and Development Center, Pittsburgh, Pennsylvania 15235
• OSTI ID: 6872426
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 53:18; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHELATES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COATINGS
COMPLEXES
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
EXPERIMENTAL DATA
FABRICATION
FILMS
FLUORINE COMPOUNDS
HALOGEN COMPOUNDS
HEAT TREATMENTS
HIGH TEMPERATURE
HYDROGEN COMPOUNDS
INFORMATION
LOW TEMPERATURE
MEDIUM TEMPERATURE
NONMETALS
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SURFACE COATING
SYNTHESIS
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
VERY HIGH TEMPERATURE
VERY LOW TEMPERATURE
WATER
YTTRIUM COMPOUNDS
YTTRIUM OXIDES