Chemical vapor deposition of YBa/sub 2/Cu/sub 3/O/sub 7/minus//ital x// superconducting films

Journal Article · Sat Jul 01 04:00:00 EDT 1989 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.343845· OSTI ID:6226348

Dickinson, P H; Geballe, T H; Sanjurjo, A; Hildenbrand, D; Craig, G; Zisk, M; Collman, J; Banning, S A; Sievers, R E

Superconducting thin films of YBa/sub 2/Cu/sub 3/O/sub 7/minus//ital x// have been producedby chemical vapor deposition. Volatile coordination compound precursors of theoxide components, ..beta..-diketonates of Y, Ba, and Cu, are thermally decomposed onhot substrates to form crystalline films. The Ba compound was evaporated in thepresence of externally added vapors of the ..beta..-diketonate to obtain steadyevaporative behavior. Superconducting films were obtained on SrTiO/sub 3/substrates at temperatures above 800 /degree/C. The best films have onsettemperatures of 90 K and loss of resistance as high as 68 K. Epitaxial growthwas obtained.

• Research Organization: Applied Physics Department, Stanford University, Stanford, California 94305(US); Materials Research Laboratory, SRI International, Menlo Park, California 94025; Chemistry Department, Stanford University, Stanford, California 94305; Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309
• DOE Contract Number: AC05-88ER80642
• OSTI ID: 6226348
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 66:1; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
EPITAXY
FILMS
MICROSCOPY
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCANNING ELECTRON MICROSCOPY
SCATTERING
STRONTIUM COMPOUNDS
SUBSTRATES
SUPERCONDUCTING FILMS
SURFACE COATING
TEMPERATURE DEPENDENCE
THERMODYNAMIC PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES