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Correlation between preirradiation channel mobility and radiation-induced interface-trap charge in metal-oxide-semiconductor transistors

Journal Article · · Applied Physics Letters; (United States)
DOI:https://doi.org/10.1063/1.104760· OSTI ID:5610465
; ;  [1];  [2]
  1. Department of Physics, Oberlin College, Oberlin, Ohio 44074 (USA)
  2. Sandia National Laboratories, Albuquerque, New Mexico 87185 (USA)

We find a strong correlation between preirradiation channel resistance and radiation-induced interface-trap charge in {ital n}-channel metal-oxide-semiconductor (MOS) transistors. While it has long been known that the postirradiation mobility of MOS transistors degrades with exposure to ionizing radiation, we believe this is the first time that differences in the postirradiation interface-trap charge have been linked to differences in preirradiation device parameters. A simple model is presented that relates the observed variations in preirradiation channel resistance to scattering from defects at the Si/SiO{sub 2} interface which may be precursors to the radiation-induced interface-trap charge.

OSTI ID:
5610465
Journal Information:
Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 58:24; ISSN APPLA; ISSN 0003-6951
Country of Publication:
United States
Language:
English