Potential applications of an electron cyclotron resonance multicusp plasma source
Conference
·
OSTI ID:5590978
An electron cyclotron resonance (ECR) multicusp plasmatron has been developed by feeding a multicusp bucket arc chamber with a compact ECR plasma source. This novel source produced large (about 25-cm-diam), uniform (to within {plus minus}10%), dense (>10{sup 11}-cm{sup -3}) plasmas of argon, helium, hydrogen, and oxygen. It has been operated to produce an oxygen plasma for etching 12.7-cm (5-in.) positive photoresist-coated silicon wafers with uniformity within {plus minus}8%. Results and potential applications of this new ECR plasma source for plasma processing of thin films are discussed. 21 refs., 10 figs.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 5590978
- Report Number(s):
- CONF-891093-3; ON: DE90001358
- Country of Publication:
- United States
- Language:
- English
Similar Records
Potential applications of an electron cyclotron resonance multicusp plasma source
Potential applications of an electron cyclotron resonance multicusp plasma source
Characteristics and potential applications of an ORNL microwave ECR multicusp plasma ion source
Journal Article
·
Tue May 01 00:00:00 EDT 1990
· Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)
·
OSTI ID:7040349
Potential applications of an electron cyclotron resonance multicusp plasma source
Technical Report
·
Wed Feb 28 23:00:00 EST 1990
·
OSTI ID:7097370
Characteristics and potential applications of an ORNL microwave ECR multicusp plasma ion source
Conference
·
Sun Dec 31 23:00:00 EST 1989
·
OSTI ID:6356930
Related Subjects
640301 -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700205* -- Fusion Power Plant Technology-- Fuel
Heating
& Injection Systems
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CYCLOTRON RESONANCE
DESIGN
ELECTRON CYCLOTRON-RESONANCE
ELECTRON TUBES
ETCHING
FILMS
ION SOURCES
PLASMATRONS
RESONANCE
SURFACE FINISHING
THIN FILMS
USES
Molecular & Chemical Physics-- Beams & their Reactions
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700205* -- Fusion Power Plant Technology-- Fuel
Heating
& Injection Systems
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CYCLOTRON RESONANCE
DESIGN
ELECTRON CYCLOTRON-RESONANCE
ELECTRON TUBES
ETCHING
FILMS
ION SOURCES
PLASMATRONS
RESONANCE
SURFACE FINISHING
THIN FILMS
USES