Potential applications of an electron cyclotron resonance multicusp plasma source
Conference
·
OSTI ID:5590978
An electron cyclotron resonance (ECR) multicusp plasmatron has been developed by feeding a multicusp bucket arc chamber with a compact ECR plasma source. This novel source produced large (about 25-cm-diam), uniform (to within {plus minus}10%), dense (>10{sup 11}-cm{sup -3}) plasmas of argon, helium, hydrogen, and oxygen. It has been operated to produce an oxygen plasma for etching 12.7-cm (5-in.) positive photoresist-coated silicon wafers with uniformity within {plus minus}8%. Results and potential applications of this new ECR plasma source for plasma processing of thin films are discussed. 21 refs., 10 figs.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- Sponsoring Organization:
- DOE/ER
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 5590978
- Report Number(s):
- CONF-891093-3; ON: DE90001358; TRN: 89-026128
- Resource Relation:
- Conference: 36. American Vacuum Society national vacuum symposium, Boston, MA (USA), 23-27 Oct 1989
- Country of Publication:
- United States
- Language:
- English
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OSTI ID:5590978
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Characteristics and potential applications of an ORNL microwave ECR multicusp plasma ion source
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OSTI ID:5590978
Related Subjects
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
PLASMATRONS
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DESIGN
ELECTRON CYCLOTRON-RESONANCE
ETCHING
ION SOURCES
THIN FILMS
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FILMS
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