Characterization of ion implanted, laser annealed silicon for solar cell applications
Conference
·
OSTI ID:5579329
It has been demonstrated that ion implanted silicon can be efficiently annealed using very fast pulses of laser radiation. A wide variety of analytical techniques have been used to determine the physical and electrical properties of ion implanted silicon crystals which have been annealed using the output of a pulsed ruby laser (energy density approx. 1.5 J/cm/sup 2/, 15 x 10/sup -9/ sec pulse duration time). Ion channeling measurements and transmission electron microscopy show that there are no extended defects remaining in the implanted region after laser annealing even when this region was made amorphous by implantation. Ion channeling measurements have been used to show that dopants occupy electrically active substitutional sites in the lattice after laser annealing even when the dopant concentration greatly exceeds the equilibrium limit of solid solubility. Results are reported. (WHK)
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- W-7405-ENG-26
- OSTI ID:
- 5579329
- Report Number(s):
- CONF-791103-82
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
CHANNELING
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DATA
DATA FORMS
DIRECT ENERGY CONVERTERS
ELASTIC SCATTERING
ELECTRON MICROSCOPY
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
GRAPHS
HEAT TREATMENTS
HEATING
HELIUM IONS
INFORMATION
ION CHANNELING
ION IMPLANTATION
LASER-RADIATION HEATING
LASERS
MICROSCOPY
NUMERICAL DATA
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASMA HEATING
RUBY LASERS
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SOLID STATE LASERS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ANNEALING
CHANNELING
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DATA
DATA FORMS
DIRECT ENERGY CONVERTERS
ELASTIC SCATTERING
ELECTRON MICROSCOPY
ELEMENTS
EQUIPMENT
EXPERIMENTAL DATA
GRAPHS
HEAT TREATMENTS
HEATING
HELIUM IONS
INFORMATION
ION CHANNELING
ION IMPLANTATION
LASER-RADIATION HEATING
LASERS
MICROSCOPY
NUMERICAL DATA
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PLASMA HEATING
RUBY LASERS
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SOLID STATE LASERS