Subwavelength, binary lenses at infrared wavelengths
- Sandia National Laboratories, Albuquerque, New Mexico 87185-0603 (United States)
We describe the nanofabrication of subwavelength, binary lenses in GaAs for operation in the infrared. Subwavelength surface relief structures create an artificial material with an effective index of refraction determined by the fill factor of the binary pattern and can be designed to yield high-efficiency diffractive optical elements. In this work, we designed and fabricated a circular-aperture, off-axis lens with a deflection angle of 20{degree}, focal length of 110 {mu}m, and diameter of 80 {mu}m, for operation at 975 nm. The off-axis lens design has a theoretical efficiency of 92{percent} and the fabricated lens exhibits a diffraction efficiency into the first order of 72{percent} and 59{percent} of the transmitted power for TE and TM polarization, respectively. A significant advantage of these subwavelength structures is that fabrication requires only a single-lithography-and-etch-step process, in this case, electron-beam lithography and reactive-ion-beam etching. {copyright} {ital 1997 American Vacuum Society.}
- Research Organization:
- Sandia National Laboratory
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 550479
- Report Number(s):
- CONF-9705218--
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 6 Vol. 15; ISSN JVTBD9; ISSN 0734-211X
- Country of Publication:
- United States
- Language:
- English
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