High-efficiency subwavelength diffractive optical element in GaAs for 975 nm
- Sandia National Laboratories, Albuquerque, New Mexico 87185-0603 (United States)
We have fabricated subwavelength diffractive optical elements with binary phase profiles for operation at 975 nm. The individual surface-relief features of the elements are smaller than the wavelength of light in the material. By modulating the size and spacing of the features we form artificial, gradient, effective index-of-refraction surfaces. The blazed transmission gratings were designed with rigorous coupled-wave analysis and fabricated by direct-write electron-beam lithography and reactive ion-beam etching in GaAs. The gratings have minimum features 63 nm wide. Transmission measurements show 85% diffraction efficiency into the first order. {copyright} 1995 Optical Society of America
- Research Organization:
- Sandia National Laboratory
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 115814
- Journal Information:
- Optics Letters, Journal Name: Optics Letters Journal Issue: 12 Vol. 20; ISSN OPLEDP; ISSN 0146-9592
- Country of Publication:
- United States
- Language:
- English
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