Elevated temperature implantation of Al sup + -ions into nickel

Conference · · TMS (The Metallurgical Society) Paper Selection; (USA)

OSTI ID:5442868

Ahmed, M; Potter, D I ^[1]

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1. Univ. of Connecticut, Storrs (USA)

The effect of substrate temperature on near surface chemical compositions and microstructures produced by Al{sup +}-ion implantation of nickel was investigated for temperatures from 25 to 500 C. Compositions were determined by Auger, energy dispersive x-ray, and Rutherford back scattering analyses. For 25 C implantation, a monotonic increase in aluminum concentration was observed, reaching {approx equal} 75 at.% Al at a fluence of 3 {times} 10{sup 18} ions/cm{sup 2}. However, the aluminum concentration exhibited maximum with fluence when the implantations were performed at 500 C, reaching {approx equal} 40 at.% Al at 1.2 {times} 10{sup 18} ions/cm{sup 2} and then dropping to {approx equal} 25 at.% Al at 2.4 {times} 10{sup 18} ions/cm{sup 2}. The role of microstructural developments in determining the maximum aluminum concentration for 500 C implantation is described. The phases observed are compared to those obtained in room temperature implantation, as well as specimens similarly implanted and then annealed.

• OSTI ID: 5442868
• Report Number(s): CONF-840909--
• Conference Information: Journal Name: TMS (The Metallurgical Society) Paper Selection; (USA) Journal Volume: 56
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
360104 -- Metals & Alloys-- Physical Properties
ALLOYS
ALUMINIUM IONS
AUGER ELECTRON SPECTROSCOPY
BACKSCATTERING
CHARGED PARTICLES
CHEMICAL COMPOSITION
COMPARATIVE EVALUATIONS
CRYSTAL STRUCTURE
ELASTIC SCATTERING
ELECTRON SPECTROSCOPY
ION IMPLANTATION
IONS
MICROSTRUCTURE
NICKEL ALLOYS
NICKEL BASE ALLOYS
PHASE TRANSFORMATIONS
RUTHERFORD SCATTERING
SCATTERING
SPECTROSCOPY
SURFACE PROPERTIES
TEMPERATURE DEPENDENCE
X-RAY SPECTROSCOPY