In situ growth of YBa sub 2 Cu sub 3 O sub x thin films by reactive cosputtering

Journal Article · Wed Jan 01 04:00:00 EST 1992 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.578070· OSTI ID:5427736

Hahn, M R; Hylton, T L; Char, K; Beasley, M R; Kapitulnik, A ^[1]

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1. Department of Applied Physics, Stanford University, Stanford, California 94305 (United States)

We have synthesized superconducting YBa{sub 2}Cu{sub 3}O{sub {ital x}} thin films {ital in} {ital situ} using magnetron cosputtering with three metallic targets (Y, Ba, Cu). We present details of the sputtering chamber, as well as the growth conditions necessary to obtain superconducting films. We discuss the effects of oxygen and ozone partial pressure, differential pumping, O{sub 2}--Ar plasma deposition and Ba--Cu alloy targets. We elaborate on our ozone condensing and delivery system. Finally, we describe the difficulties encountered with the deposition system and provide details of possible improvements.

• OSTI ID: 5427736
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 10:1; ISSN 0734-2101; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
ALKALINE EARTH METAL COMPOUNDS
AMINES
AMMONIUM COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELEMENTS
FILMS
HIGH-TC SUPERCONDUCTORS
NONMETALS
ORGANIC COMPOUNDS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
OZONE
PARTIAL PRESSURE
QUATERNARY COMPOUNDS
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES