In situ x-ray diffraction studies of YBa sub 2 Cu sub 3 O sub x

Journal Article · Sun Nov 15 04:00:00 EST 1992 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.352093· OSTI ID:7163264

Williams, S; Zheng, J Q; Shih, M C; Wang, X K; Lee, S J; Rippert, E D; Maglic, S; Kajiyama, H; Segel, D; Dutta, P; Chang, R P.H.; Ketterson, J B ^[1]; Roberts, T; Lin, Y; Kampwirth, R T; Gray, K ^[2]

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1. NSF Science and Technology Center for Superconductivity and Materials Research Center, Northwestern University, Evanston, Illinois 60208 (United States)
2. Material Science Division, Argonne National Laboratory, Argonne, Illinois 60439 (United States)

Using a specially designed off-axis faced magnetron sputtering chamber we have performed {ital in} {ital situ} x-ray diffraction studies of the growth of YBa{sub 2}Cu{sub 3}O{sub {ital x}} films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O{sub 2}/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO{sub 3}, LaAlO{sub 3}, and MgO.

• OSTI ID: 7163264
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 72:10; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
BREMSSTRAHLUNG
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DIFFRACTION
ELECTROMAGNETIC RADIATION
FILMS
GROWTH
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
RADIATIONS
SCATTERING
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SYNCHROTRON RADIATION
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES