Large-area sputtering of in situ superconducting YBa sub 2 Cu sub 3 O sub 7 films

Journal Article · Wed May 01 00:00:00 EDT 1991 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.577587· OSTI ID:5490904

Ballentine, P H; Allen, J P ^[1]; Kadin, A M; Mallory, D S ^[2]

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1. CVC Products, Inc., Rochester, New York 14603 (USA)
2. Department of Electrical Engineering, University of Rochester, Rochester, New York 14627 (USA)

High-temperature superconducting thin films of YBa{sub 2}Cu{sub 3}O{sub 7} are deposited on 2 in. MgO and LaAlO{sub 3} substrates by radio frequency magnetron sputtering from an 8 in. diam powder target. By locating the substrate above the center of the magnetron erosion ring and by placing a negative ion shield'' between the target and the substrate, negative ion resputtering is avoided and high quality films are grown {ital in} {ital situ}, and are superconducting on removal from the vacuum chamber without a high-temperature post anneal. Stoichiometric films on LaAlO{sub 3} and MgO have critical temperatures up to 88 K and critical currents above 5{times}10{sup 5} A/cm{sup 2} at 77 K. Uniformity in thickness of {plus minus}5%, and in room temperature resistivity of {plus minus}7% were measured on 2 in. diam substrates. Microwave surface resistance measurements at 1.2 GHz and 4.2 K showed {ital R}{sub {ital s}}{approx}0.1 m{Omega} for YBCO ground planes and {approx}0.3 m{Omega} for patterned YBCO strip lines on MgO.

• OSTI ID: 5490904
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
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GHZ RANGE
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HIGH-TC SUPERCONDUCTORS
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
POWDERS
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
ULTRALOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES