In-situ sputtering of YBCO films for microwave applications

Conference · Thu Feb 28 23:00:00 EST 1991 · IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)

OSTI ID:5932010

Ballentine, P H ^[1]; Kadin, A M; Mallory, D S ^[2]

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1. CVC Products, Inc., Rochester, NY (US)
2. Rochester Univ., NY (United States). Dept. of Electrical Engineering

The authors of this paper used rf magnetron sputtering from a single YBCO target onto a heated substrate ({approx}700{degrees} C) to obtain c-axis oriented 1-2-3 films that are superconducting without a subsequent annealing or oxygenation step, with T{sub c}(R = O) as high as 88 K on MgO and LaAlO{sub 3} substrates. This process uses an 8-inch diameter target in the sputter-up configuration, with a central grounded shield to eliminate negative ion bombardment. It can reproducibly and uniformly cover substrates as large as 3 inches across, at rates exceeding 1 {Angstrom}/s. Maintaining film composition very close to stoichiometry is essential for obtaining films with good superconducting properties and surface morphology. Optimum films have critical currents {approx}1 MA/cm{sup 2} at 77 K. Measurements of microwave surface resistance based on a stripline resonator indicate low surface resistance for unpatterned YBCO ground planes, but excess loss and a strong power dependence in a patterned center strip.

• OSTI ID: 5932010
• Report Number(s): CONF-900944--
• Journal Information: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) Vol. 27:2; ISSN IEMGA; ISSN 0018-9464
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360207 -- Ceramics
Cermets
& Refractories-- Superconducting Properties-- (1992-)
665412 -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANIONS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CRYSTAL STRUCTURE
CURRENTS
ELECTRIC CURRENTS
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
GRAIN ORIENTATION
IN-SITU PROCESSING
IONS
MAGNETRONS
MICROSTRUCTURE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MORPHOLOGY
ORIENTATION
OXIDES
OXYGEN COMPOUNDS
PROCESSING
RESONATORS
RF SYSTEMS
SHIELDS
SPUTTERING
STOICHIOMETRY
SUPERCONDUCTING FILMS
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES