In-situ deposition of superconducting YBCO thin films by magnetron sputtering from powder target

Journal Article · Mon Jun 01 00:00:00 EDT 1992 · Journal of Superconductivity; (United States)

DOI:https://doi.org/10.1007/BF00617623· OSTI ID:6990429

Luo, W G; Ding, A L; Chan, K S; Siu, G G; Cheng, A; Young, E C.M. ^[1]

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1. Shanghai Inst. of Ceramics (China) City Polytechnic of Hong Kong (Hong Kong)

We have used stoichiometric YBCO powder as magnetron sputtering target to deposit high-quality high-Tc superconducting thin films on MgO, SrTiO[sub 3], and ZrO[sub 2] substrates. The zero-resistance temperatures are 86-88 K, and the 77 K zero-field critical current density is 8 x 10 exp 5 A/sq cm. The films are highly c-axis oriented. Films deposited on 10 x 10 x 1 cu mm ZrO[sub 2] substrates have surface resistances below 25 milliohms at 77 K and 94 GHz. Using powder targets instead of bulk targets has the following advantages: simple and low-cost target preparation, simple target replacement, and versatility for large-area deposition. 9 refs.

• OSTI ID: 6990429
• Journal Information: Journal of Superconductivity; (United States), Journal Name: Journal of Superconductivity; (United States) Vol. 5:3; ISSN JOUSEH; ISSN 0896-1107
• Country of Publication: United States
• Language: English

Related Subjects

665410* -- Superconductivity-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
HIGH-TC SUPERCONDUCTORS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
POWDERS
SCATTERING
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TARGETS
THIN FILMS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES