RF magnetron sputtering of thick platinum coatings on glass microspheres

Conference · Wed May 28 00:00:00 EDT 1980

OSTI ID:5356034

Meyer, S F; Hsieh, E J; Burt, R J

Thick platinum coatings on glass microspheres are needed for proposed Laser Fusion targets. The spherical nature of these substrates coupled with the small dimensions (approx. 100 ..mu..m OD) make it difficult to achieve a smooth and uniform coating. Coating problems encountered include a rough surface and porous microstructure from the oblique incidence and lack of temperature and bias control, clumping of the microspheres causing non-uniformities, and particle accumulation causing cone defects. Sputtering parameters significantly affecting the coatings include total pressure, DC substrate bias, and the addition of doping gases. Using an ultrasonic vibrating screened cage and RF magnetron Sputtergun, we have successfully batch coated microspheres with up to 6 ..mu..m of Pt, with a surface roughness of 200 nm, thickness non-concentricity of 300 nm, and density greater than 98% of bulk Pt.

• Research Organization: California Univ., Livermore (USA). Lawrence Livermore Lab.
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5356034
• Report Number(s): UCRL-83532; CONF-800439-9
• Country of Publication: United States
• Language: English

Related Subjects

060201* -- Fusion Fuels-- Fabrication & Testing-- (1980-1987)
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
DEPOSITION
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
FABRICATION
LASER TARGETS
MAGNETRONS
METALS
MICROSPHERES
MICROWAVE EQUIPMENT
MICROWAVE TUBES
PLATINUM
PLATINUM METALS
SPUTTERING
SURFACE COATING
TARGETS
TRANSITION ELEMENTS